Research Catalog
Submicron lithography / Phillip D. Blais, chairman/editor ; in cooperation with the International Society for Hybrid Microelectronics, the Northern California Microphotomask/Masking Working Group, the Materials Research Society, March 29-30, 1982, Santa Clara, California.
- Title
- Submicron lithography / Phillip D. Blais, chairman/editor ; in cooperation with the International Society for Hybrid Microelectronics, the Northern California Microphotomask/Masking Working Group, the Materials Research Society, March 29-30, 1982, Santa Clara, California.
- Publication
- Bellingham, Wash. : International Society for Optical Engineering, 1982.
Items in the Library & Off-site
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1 Item
| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
| Text | Request in advance | TK7874 .S85 1982 | Off-site |
Details
- Additional Authors
- Blais, Phillip D.
- International Society for Hybrid Microelectronics. http://id.loc.gov/authorities/names/n50037241
- Materials Research Society. http://id.loc.gov/authorities/names/n79060208
- Northern California Microphotomask/Masking Working Group. http://id.loc.gov/authorities/names/n80015592
- Society of Photo-optical Instrumentation Engineers. http://id.loc.gov/authorities/names/n78088934
- Description
- viii, 179 pages : illustrations; 28 cm.
- Series Statement
- Proceedings of SPIE--the International Society for Optical Engineering ; v. 333
- Uniform Title
- Proceedings of SPIE--the International Society for Optical Engineering ; v. 333.
- Subject
- Bibliography (note)
- Includes bibliographical references and indexes.
- ISBN
- 0892523689 (pbk.)
- LCCN
- 82060280
- Owning Institutions
- Columbia University Libraries