Research Catalog

Integrated circuit metrology, inspection, and process control IX : 20-22 February 1995, Santa Clara, California

Title
Integrated circuit metrology, inspection, and process control IX : 20-22 February 1995, Santa Clara, California / Marylyn H. Bennett, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International.
Publication
Bellingham, Wash., USA : SPIE, [1995], ©1995.

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Details

Additional Authors
  • Bennett, Marylyn Hoy.
  • Society of Photo-optical Instrumentation Engineers.
  • Semiconductor Equipment and Materials International.
Description
xi, 514 pages : illustrations; 28 cm.
Series Statement
Proceedings / SPIE--the International Society for Optical Engineering ; v. 2439
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2439.
Subjects
Bibliography (note)
  • Includes bibliographical references and author index.
ISBN
0819417874 (pbk.)
LCCN
94069902
OCLC
ocm32644755
Owning Institutions
Columbia University Libraries