Research Catalog

Optical/laser microlithography VIII : 22-24 February 1995, Santa Clara, California

Title
Optical/laser microlithography VIII : 22-24 February 1995, Santa Clara, California / Timothy A. Brunner, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International.
Publication
Bellingham, Wash. : SPIE, [1995], ©1995.

Items in the Library & Off-site

Filter by

1 Item

StatusFormatAccessCall NumberItem Location
Request for On-site UseRequest Scan
Not available - Please for assistance.
TextRequest in advance TA1677 .O673 1995gOff-site

Holdings

Details

Additional Authors
  • Brunner, Timothy A.
  • Society of Photo-optical Instrumentation Engineers.
  • Semiconductor Equipment and Materials International.
Description
xii, 948 pages : illustrations; 28 cm.
Series Statement
Proceedings / SPIE--the International Society for Optical Engineering ; v. 2440
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2440.
Alternative Title
  • Optical laser microlithography VIII
  • Optical/laser microlithography 8
  • Optical/laser microlithography eight
Subjects
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0819417882 (pbk.)
LCCN
94069903
OCLC
ocm32689495
Owning Institutions
Columbia University Libraries