Research Catalog

Title

Micromachined devices and components : 23-24 October, 1995, Austin, Texas / Ray Roop, Kevin Chau, chairs/editors ; sponsored by SEMI-Semiconductor Equipment and Materials International [and others], published by SPIE--the International Society for Optical Engineering.

Publication

Bellingham, Wash., USA : SPIE, [1995], ©1995.

Items in the Library & Off-site

Details

Additional Authors

• Roop, Ray.
• Chau, Kevin.
• Semiconductor Equipment and Materials International.
• Society of Photo-optical Instrumentation Engineers.

Description

ix, 296 pages : illustrations; 28 cm.

Series Statement

Proceedings / SPIE--the International Society for Optical Engineering ; v. 2642

Uniform Title

Proceedings of SPIE--the International Society for Optical Engineering ; v. 2642.

Subject

• Micromechanics > Congresses

Bibliography (note)

• Includes bibliographic references and author index.

Contents

• Projection displays and MEMS: timely convergence for a bright future / L. J. Hornbeck -- Recent trends in silicon micromachining technology / H. Jerman -- Thermal microactuators for surface-micromachining processes / J. H. Comtois, V. M. Bright and M. W. Phipps -- Mechanical and optical characterization of thermal microactuators fabricated in a CMOS process / B. C. Read III, V. M. Bright and J. H. Comtois -- Three-dimensional structures for micro-optical mechanical systems in standard CMOS / E. J. J. Kruglick, S. Damle and K. S. J. Pister -- Measurement of static friction in mechanical couplings of articulated microrobots / R. Yeh and K. S. J. Pister -- Measured forces and displacements of integrated force arrays / S. Goodwin-Johansson, S. M. Bobbio, C. Bartlett, N. Eleyan, J. Jacobson, J. Mancusi, L. Yadon, C. Ball, T. D. DuBois, W. Palmer, D. Vellenga and F. M. Tranjan -- Design, fabrication, and characterization of electrostatic microrelays / S. Roy and M. Mehregany --
• Silicon membrane gyroscope with electrostatic actuation and sensing / D. Wood, G. Cooper, J. S. Burdess, A. J. Harris and J. L. Cruickshank -- Thick polysilicon-based surface micromachined capacitive accelerometer with force-feedback operation / B. Wenk, J. Ramos-Martos, M. Fehrenbach, P. Lange, M. Offenberg and W. Riethmuller -- Monolithic multiple axis accelerometer design in standard CMOS / B. Warneke, E. J. Hoffman and K. S. J. Pister -- Chemical gas sensors on silicon / H. G. Hughes -- Silicon micromachined gas chromatographic system (SMGCS) for directly separating binary fugitive emissions of ammonia (NH[subscript 3]) and nitrogen dioxide (NO[subscript 2]) / E. S. Kolesar, Jr. and R. R. Reston -- Micromachined hydrocarbon-based gas sensors / A. Srivastava, N. George and J. Cherukuri -- Heart cell contractions measured using a micromachined polysilicon force transducer / G. Lin, K. S. J. Pister and K. P. Roos --
• Microfabricated sensors for the measurement of electromagnetic fields in biological tissues / J. Monberg and A. K. Henning -- Static micromixer built up in silicon / N. Schwesinger and T. Frank -- Rapid prototyping of a micro pump with laser micromachining / C. C. Wong, D. Chu, S. L. Liu, M. R. Tuck, Z. Mahmud and V. Amatucci -- Smart electronics and MEMS for aerospace structures / V. K. Varadan and V. V. Varadan -- Design of an inductive proximity sensor using a two-coil planar transformer / V. I. Gupta and D. P. Neikirk -- Multiaxis microcoil sensors in standard CMOS / B. Eyre, K. S. J. Pister and W. Gekelman -- Finite element modeling microelectromechanical structures for sensing applications / J. T. Stewart -- Linearization techniques for capacitive sensors / B. K. Kar and E. Joseph -- CAD framework concept for the design of integrated microsystems / A. Poppe, M. Rencz, V. Szekely, J.-M. Karam, B. Courtois, K. Hofmann and M. Glesner --
• Microelectromechanical gyroscope: analysis and simulation using SPICE electronic simulator / A. Burstein and W. J. Kaiser -- Finite element modeling of the dynamic response of a MEMS sensor / Y.-H. Lim, V. V. Varadan and V. K. Varadan -- Micromachined Fabry-Perot cavity pressure transducer with optical fiber interconnects / Y. Kim and D. P. Neikirk -- ARROW-based integrated optical pressure sensors / K. Benaissa and A. Nathan -- Characterization of a surface micromachined pressure sensor array / W. P. Eaton and J. H. Smith -- Effect of machine parameters on polymer die attach dispense and a method to optimize them / D. S. Mahadevan -- Packaging of MEMS devices / A. K. Hu and E. D. H. Green -- Biodriven microsystem for treatment of hydrocephalus / J. Joswig, J. Oswald and S. Seifert -- 3D[mu]V: a MEMS 3D visualization package / N. R. Lo and K. S. J. Pister.

ISBN

0819420085

LCCN

95070377

OCLC

ocm33474557

Owning Institutions

Columbia University Libraries