Research Catalog

Title

Microelectronic structures and microelectromechanical devices for optical processing and multimedia applications : 24 October, 1995, Austin, Texas / Wayne Bailey [and others], chairs/editors ; sponsored by SEMI-Semiconductor Equipment and Materials International [and others], published by SPIE--the International Society for Optical Engineering.

Publication

Bellingham, Wash., USA : SPIE, [1995], ©1995.

Items in the Library & Off-site

Details

Additional Authors

• Bailey, Wayne E.
• Semiconductor Equipment and Materials International.
• Society of Photo-optical Instrumentation Engineers.

Description

v, 154 pages : illustrations; 28 cm.

Series Statement

Proceedings / SPIE--the International Society for Optical Engineering ; v. 2641

Uniform Title

Proceedings of SPIE--the International Society for Optical Engineering ; v. 2641.

Subjects

• Microelectronics > Congresses
• Optics > Congresses
• Micromechanics > Congresses

Bibliography (note)

• Includes bibliographic references and author index.

Contents

• Projection displays and MEMS: timely convergence for a bright future / L. J. Hombeck -- Recent trends in silicon micromachining technology / H. Jerman -- Review of the current status of CRT technologies / H.-S. Tong and C.-M. Hu -- Micromachined three-dimensional tunable Fabry-Perot etalons / L.-Y. Lin, J. L. Shen, S.-S. Lee and M. C. Wu -- Design and fabrication of ARROW thermo-optic modulators / K. Benaissa, Y. Lu and A. Nathan -- Active interference filters using silicon-compatible materials / D. P. Poenar, P. J. French and R. F. Wolffenbuttel -- Realization of FDDI optical bypass switches using surface micromachining technology / S.-S. Lee, L.-Y. Lin and M. C. Wu -- Simulation and fabrication of ARROW directional couplers / K. Benaissa, A. Nathan, S. T. Chu and W. P. Huang -- Piezoelectric fiber optic modulators and microtubes / G. R. Fox, C. A. P. Muller, M. Kuhn, N. J. Setter, N. H. Ky and H. G. Limberger --
• Projection display systems based on the Digital Micromirror Device (DMD) / J. M. Younse -- Implementation of hexagonal micromirror arrays as phase-mostly spatial light modulators / J. H. Comtois, V. M. Bright, S. C. Gustafson and M. A. Michalicek -- Fabrication of micromirror supported by electroplated nickel posts / J.-W. Shin, S.-W. Chung, Y.-K. Kim, E.-H. Lee, B.-G. Choi and S.-J. Ahn -- MEMS arrays for deformable mirrors / R. Krishnamoorthy and T. G. Bifano -- Fabrication issues for silicon backplane active matrix miniature liquid crystal display / I. Underwood, D. C. Burns, I. D. Rankine, D. J. Bennett, J. A. Gourlay, A. O'Hara and D. G. Vass -- Gas-phase silicon micromachining with xenon difluoride / F. I. Chang, R. Yeh, G. Lin, P. B. Chu, E. J. Hoffman, E. J. J. Kruglick, K. S. J. Pister and M. H. Hecht --
• Post-processing using microfabrication techniques to improve the optical performance of liquid crystal over silicon backplane spatial light modulators / A. O'Hara, I. D. Rankin, M. Begbie, D. G. Vass, D. C. Burns, I. Underwood and J. T. M. Stevenson -- Fabrication and characterization of gated Si field emitter arrays with gate aperture below 0.5 [mu]m / T.-K. Ku, B. B. Hsieh, M. S. Chen, C.-C. Wang, P. W. Wang, I.-J. Hsieh and H.-C. Cheng -- Fabrication and characterization of the Pd-silicided emitters for field-emission devices / C.-C. Wang, T.-K. Ku, M.-S. Feng, I.-J. Hsieh and H.-C. Cheng.

ISBN

0819420077

LCCN

95070376

OCLC

ocm33474487

Owning Institutions

Columbia University Libraries