Research Catalog

Title

IEEE/UCS/SEMI International Symposium on Semiconductor Manufacturing / sponsored by the IEEE Electron Devices Society, and the Components Packaging & Manufacturing Technology Society and the Ultra Clean Society.

Author

International Symposium on Semiconductor Manufacturing (4th : 1995 : Austin, Tex.)

Publication

[New York, N.Y.] : Institute of Electrical and Electronics Engineers ; Piscataway, NJ : Additional copies may be purchased from IEEE Service Center, [1995], ©1995.

Items in the Library & Off-site

Holdings

Details

Additional Authors

• Semiconductor Equipment and Materials International.
• Ultra Clean Society.
• IEEE Electron Devices Society.
• Components, Packaging & Manufacturing Technology Society.

Description

ix, 294 pages : illustrations; 28 cm

Alternative Title

• 1995 Proceedings, International Symposium on Semiconductor Manufacturing, ISSM '95
• Proceedings
• 1995 IEEE International Symposium on Semiconductor Manufacturing
• 1995 International Symposium on Semiconductor Manufacturing
• ISSM '95

Subjects

• Electronic industries > Congresses
• Semiconductors > Design and construction > Congresses
• Computer integrated manufacturing systems > Congresses
• Semiconductor wafers > Congresses
• Confocal microscopy > Congresses

Note

• "IEEE catalog number 95CH35841"--T.p. verso.

Contents

session 1. Global manufacturing issues -- session 2. Process & manufacturing I -- session 3. Yield management & defect controls -- session 4. Scheduling & real time management -- Poster session -- session 5. Manufacturing and the environment -- session 6. Equipment & manufacturing -- session 7. Logistics & fab performance -- session 8. Process & manufacturing II.

ISBN

• 0780329295 (casebound ed.)
• 95-78629 (canceled/invalid)

OCLC

ocm33829228

Owning Institutions

Columbia University Libraries