Research Catalog
Proceedings of the Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing
- Title
- Proceedings of the Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing / organizers/editors, M. Meyyappan, D.J. Economou, S.W. Butler.
- Author
- Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing (1st : 1995 : Reno, Nev.)
- Publication
- Pennington, NJ : Electrochemical Society, [1995], ©1995.
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1 Item
| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
| Text | Request in advance | TK7871.85 .S9745 1995g | Off-site |
Details
- Additional Authors
- Description
- x, 630 pages : illustrations; 23 cm.
- Series Statement
- Proceedings ; v. 95-2
- Uniform Title
- Proceedings (Electrochemical Society) ; v. 95-2.
- Alternative Title
- Process control, diagnostics, and modeling in semiconductor manufacturing
- Subjects
- Note
- "This proceedings volume contains papers presented at the First Symposium on Control, Diagnostics, and Modeling in Semiconductor Manufacturing. The Symposium was part of the 187th meeting of the Electrochemical Society held in Reno, Nevada, during May 21-26, 1995"--Pref.
- "Dielectric Science and Technology and Electronics Divisions."
- Bibliography (note)
- Includes bibliographical references and index.
- ISBN
- 1566770963
- LCCN
- 95060437
- OCLC
- 34001704
- ocm34001704
- Owning Institutions
- Columbia University Libraries