Research Catalog

The Ninth Annual International Workshop on Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and systems : San Diego, California, USA, February 11-15, 1996

Title
The Ninth Annual International Workshop on Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and systems : San Diego, California, USA, February 11-15, 1996 / sponsored by the IEEE Robotics and Automation Society.
Author
IEEE Workshop on Micro Electro Mechanical Systems (9th : 1996 : San Diego, Calif.)
Publication
Piscataway, NJ : IEEE Service Center, [1996], ©1996.

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Details

Additional Authors
IEEE Robotics and Automation Society.
Description
xxiv, 528 pages : illustrations; 28 cm
Alternative Title
  • Investigation of micro structures, sensors, actuators, machines and systems
  • 1996 IEEE Micro Electro Mechanical Systems
Subject
  • Electromechanical devices > Congresses
  • Miniature objects > Congresses
  • Microelectronics > Congresses
  • Robotics > Congresses
Note
  • "IEEE catalog number 96CH35856."
  • At head of title: Proceedings, IEEE.
Bibliography (note)
  • Includes bibliographical references and indexes.
ISBN
  • 0780329856 (softbound)
  • 0780329864 (casebound)
  • 0780329872 (microfiche)
OCLC
  • 503660043
  • ocn503660043
Owning Institutions
Columbia University Libraries