Research Catalog

Diamond chemical vapor deposition : nucleation and early growth stages

Title
Diamond chemical vapor deposition : nucleation and early growth stages / by Huimin Liu and David S. Dandy.
Author
Liu, Huimin, 1961-
Publication
Park Ridge, N.J. : Noyes Publications, [1995], ©1995.

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Additional Authors
Dandy, David S.
Description
xi, 195 pages : illustrations; 25 cm
Summary
  • This book presents an updated, systematic review of the latest developments in diamond CVD processes, with emphasis on the nucleation and early growth stages of diamond CVD. The objective of this book is to familiarize the reader with the scientific and engineering aspects of diamond CVD, and to provide experienced researchers, scientists and engineers in the academic and industry communities with the latest developments in this growing field.
  • The scope of the present book encompasses the developments and applications of diamond CVD, starting with a brief description of atomic and crystal structures of diamond and a review of the various processing techniques used in diamond CVD. It is followed by an extensive discussion of fundamental phenomena, principles and processes involved in diamond CVD, with emphasis on the nucleation and early growth stages of diamond during CVD. Diamond nucleation mechanisms, epitaxy and oriented growth are discussed on the basis of experimental observations. The nucleation enhancement methods developed to date are summarized. The effects of surface conditions and deposition parameters on surface nucleation are described.
  • Finally, theoretical and modeling studies on surface nucleation are reviewed.
Subjects
Bibliography (note)
  • Includes bibliographical references (p. 160-182) and index.
Contents
1. General Introduction -- 2. Atomic and Crystal Structures of Diamond -- 3. Diamond CVD Techniques -- 4. Diamond Nucleation Mechanisms -- 5. Diamond Epitaxy, Oriented Growth, and Morphology Evolution -- 6. Effects of Surface Conditions on Diamond Nucleation -- 7. Effects of Deposition Conditions on Diamond Nucleation -- 8. Theoretical and Modeling Studies on Diamond Nucleation.
ISBN
0815513801
LCCN
95030332
OCLC
  • 32698652
  • ocm32698652
Owning Institutions
Columbia University Libraries