Research Catalog

Introduction to microlithography : theory, materials, and processing / L.F. Thompson, editor, C.G. Willson, editor, M.J. Bowden, editor ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983.

Title
Introduction to microlithography : theory, materials, and processing / L.F. Thompson, editor, C.G. Willson, editor, M.J. Bowden, editor ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983.
Publication
Washington, D.C. : The Society, 1983.

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Details

Additional Authors
  • American Chemical Society. Division of Organic Coatings and Plastics Chemistry.
  • American Chemical Society. Meeting (185th : 1983 : Seattle, Wash.)
  • Bowden, M. J., 1943-
  • Thompson, L. F., 1944-
  • Willson, C. G. (C. Grant), 1939-
Description
ix, 363 p. : ill.; 24 cm.
Series Statement
ACS symposium series, 0097-6156 ; 219
Uniform Title
ACS symposium series ; 219.
Subjects
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0841207755
LCCN
83005968//r83
Owning Institutions
Columbia University Libraries