Research Catalog
Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing
- Title
- Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing / editors, Richard E. Novak, Jerzy Ruzyllo ; assistant editors, A. Bowling [and others].
- Author
- International Symposium on Cleaning Technology in Semiconductor Device Manufacturing (4th : 1995 : Chicago, Ill.)
- Publication
- Pennington, NJ : Electrochemical Society, [1996], ©1996.
Items in the Library & Off-site
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1 Item
| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
| Text | Request in advance | TK7871.85 .I5824 1995 | Off-site |
Holdings
Details
- Additional Authors
- Description
- xii, 626 pages : illustrations; 23 cm.
- Series Statement
- Proceedings ; v. 95-20
- Uniform Title
- Proceedings (Electrochemical Society) ; v. 95-20.
- Alternative Title
- Cleaning technology in semiconductor device manufacturing IV
- Subject
- Note
- "Electronics Division."
- Bibliography (note)
- Includes bibliographical references and indexes.
- ISBN
- 1566771153
- LCCN
- 95061593
- OCLC
- 35114783
- ocm35114783
- Owning Institutions
- Columbia University Libraries