Research Catalog

1996 1st International Symposium on Plasma Process-Induced Damage : 13-14 May 1996, Santa Clara, California, USA

Title
1996 1st International Symposium on Plasma Process-Induced Damage : 13-14 May 1996, Santa Clara, California, USA / Kim P. Cheung, Moritaka Nakamura, and Calvin T. Gabriel, editors ; technical co-sponsors, IEEE/Electron Devices Society, American Vacuum Society, Japanese Society of Applied Physics.
Author
International Symposium on Plasma Process-Induced Damage (1st : 1996 : Santa Clara, Calif.)
Publication
Sunnyvale, CA : Northern California Chapter of the American Vacuum Society, [1996], ©1996.

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Holdings

Details

Additional Authors
  • Cheung, Kin P.
  • Nakamura, Moritaka.
  • Gabriel, Calvin T.
  • IEEE Electron Devices Society.
  • American Vacuum Society.
  • Ōyō Butsuri Gakkai.
Description
237 pages : illustrations; 28 cm
Subjects
Note
  • "IEEE catalog no. 96TH8142"--T.p. verso.
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
  • 0965157709 (softbound)
  • 0780330617 (microfiche)
LCCN
96068444
OCLC
ocm35121812
Owning Institutions
Columbia University Libraries