Research Catalog

Optical microlithography IX : 13-15 March, 1996, Santa Clara, California

Title
Optical microlithography IX : 13-15 March, 1996, Santa Clara, California / Gene E. Fuller, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering; cooperating organizations SEMI--Semiconductor Equipment and Materials International, SEMATECH.
Publication
Bellingham, Wash., USA : SPIE, [1996], ©1996.

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Details

Additional Authors
  • Fuller, Gene E.
  • Society of Photo-optical Instrumentation Engineers.
  • Semiconductor Equipment and Materials International.
  • SEMATECH (Organization)
Description
xii, 914 pages : illustrations; 28 cm.
Series Statement
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2726
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2726.
Subjects
Bibliography (note)
  • Includes bibliographic references and author index.
ISBN
0819421022
LCCN
95072315
OCLC
ocm35129243
Owning Institutions
Columbia University Libraries