Research Catalog

Microelectronic manufacturing yield, reliability, and failure analysis II : 16-17 October, 1996, Austin, Texas

Title
Microelectronic manufacturing yield, reliability, and failure analysis II : 16-17 October, 1996, Austin, Texas / Ali Keshavarzi, Sharad Prasad, Hans-Dieter Hartmann, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International.
Publication
Bellingham, Wash., USA : SPIE, [1996], ©1996.

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Details

Additional Authors
  • Ali Keshavarzi.
  • Prasad, Sharad.
  • Hartmann, Hans-Dieter.
  • Society of Photo-optical Instrumentation Engineers.
  • Semiconductor Equipment and Materials International.
Description
ix, 372 pages : illustrations; 28 cm.
Series Statement
Proceedings / SPIE--the International Society for Optical Engineering ; v. 2874
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2874.
Subjects
Bibliography (note)
  • Includes bibliographic references and author index.
ISBN
081942272X
LCCN
96069469
OCLC
ocm35664626
Owning Institutions
Columbia University Libraries