Research Catalog

Ion implantation : equipment and techniques : proceedings of the Fourth International Conference, Berchtesgaden, Fed. Rep. of Germany, September 13-17, 1982 / editors, H. Ryssel and H. Glawischnig.

Title
Ion implantation : equipment and techniques : proceedings of the Fourth International Conference, Berchtesgaden, Fed. Rep. of Germany, September 13-17, 1982 / editors, H. Ryssel and H. Glawischnig.
Publication
Berlin ; New York : Springer-Verlag, 1983.

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Details

Additional Authors
  • Glawischnig, H. (Hans), 1939-
  • International Conference on Ion Implantation: Equipment and Techniques (4th : 1982 : Berchtesgaden, Germany)
  • Ryssel, Heiner, 1941-
Description
x, 556 p. : ill.; 24 cm.
Series Statement
Springer series in electrophysics ; v. 11
Uniform Title
Springer series in electrophysics ; v. 11.
Subjects
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0387124918 (U.S.)
LCCN
83006689
Owning Institutions
Columbia University Libraries