Research Catalog

Topics in growth and device processing of III-V semiconductors

Title
Topics in growth and device processing of III-V semiconductors / S.J. Pearton & C.R. Abernathy, F. Ren.
Author
Pearton, S. J.
Publication
Singapore ; River Edge, NJ : World scientific, [1996], ©1996.

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TextRequest in advance TK7871.99.C65 P43 1996gOff-site

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Details

Additional Authors
  • Abernathy, C. R.
  • Ren, F.
Description
xiii, 546 pages : illustrations; 23 cm.
Series Statement
International series on advances in solid state electronics and technology
Uniform Title
International series on advances in solid state electronics and technology.
Subjects
Bibliography (note)
  • Includes bibliographical references and index.
Contents
Ch. 1. Compound Semiconductor Growth by Metalorganic Molecular Beam Epitaxy (MOMBE) -- Ch. 2. Growth of Heterojunction Bipolar Transistors from Molecular Beams -- Ch. 3. Heteroepitaxy -- Ch. 4. Implant Doping and Isolation -- Ch. 5. Rapid Thermal Annealing -- Ch. 6. Wet and Dry Etching of III-V Semiconductors -- Ch. 7. Hydrogen in Crystalline Semiconductors: III-V Compounds -- Ch. 8. Heterojunction Bipolar Transistors: Processing and Devices -- Ch. 9. Novel Heterostructure Field Effect Transistors.
ISBN
9810218842
OCLC
ocm36565879
Owning Institutions
Columbia University Libraries