Research Catalog
Topics in growth and device processing of III-V semiconductors
- Title
- Topics in growth and device processing of III-V semiconductors / S.J. Pearton & C.R. Abernathy, F. Ren.
- Author
- Pearton, S. J.
- Publication
- Singapore ; River Edge, NJ : World scientific, [1996], ©1996.
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Status | Format | Access | Call Number | Item Location |
---|---|---|---|---|
Text | Request in advance | TK7871.99.C65 P43 1996g | Off-site |
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Details
- Additional Authors
- Description
- xiii, 546 pages : illustrations; 23 cm.
- Series Statement
- International series on advances in solid state electronics and technology
- Uniform Title
- International series on advances in solid state electronics and technology.
- Subjects
- Bibliography (note)
- Includes bibliographical references and index.
- Contents
- Ch. 1. Compound Semiconductor Growth by Metalorganic Molecular Beam Epitaxy (MOMBE) -- Ch. 2. Growth of Heterojunction Bipolar Transistors from Molecular Beams -- Ch. 3. Heteroepitaxy -- Ch. 4. Implant Doping and Isolation -- Ch. 5. Rapid Thermal Annealing -- Ch. 6. Wet and Dry Etching of III-V Semiconductors -- Ch. 7. Hydrogen in Crystalline Semiconductors: III-V Compounds -- Ch. 8. Heterojunction Bipolar Transistors: Processing and Devices -- Ch. 9. Novel Heterostructure Field Effect Transistors.
- ISBN
- 9810218842
- OCLC
- ocm36565879
- Owning Institutions
- Columbia University Libraries