Research Catalog

Integrated electrostatic RMS-to-DC converter : fabricated in a BIFET-compatible surface-micromachining process

Title: Integrated electrostatic RMS-to-DC converter : fabricated in a BIFET-compatible surface-micromachining process / door Bert Pieter van Drieënhuizen.
Author: Drieënhuizen, Bert Pieter van, 1968-
Publication: Delft : Delft University Press, [1996], ©1996.

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Status	Format	Access	Call Number	Item Location
Request for On-site Use Request Scan How do I pick up this item and when will it be ready?	Text	Request in advance	TJ1191 .D75 1996	Off-site

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Details

Description

x, 244 pages : illustrations; 24 cm

Subjects

Thesis (note)

Originally presented as the author's thesis (doctoral)--Technische Universiteit Delft, 1996.

Bibliography (note)

Includes bibliographical references.

Language (note)

Summary also in Dutch.

Contents

1. Introduction -- 2. Integrated RMS-to-DC Converters -- 3. Design of an electrostatic RMS-to-DC converter -- 4. Silicon Micromachined Sensors and Actuators -- 5. BIFET-compatible Surface-Micromachining Process Module -- 6. Stress measurement techniques -- 7. Conclusions -- App. A. Mechanical calculations -- App. B. Surface-Micromachining Process Description.

ISBN

9040713448

OCLC

35836396
ocm35836396

Owning Institutions

Columbia University Libraries