Research Catalog

Ion implantation technology--96 : proceedings of the Eleventh International Conference on Ion Implantation Technology, Austin, Texas, USA, June 16-21, 1996

Title
Ion implantation technology--96 : proceedings of the Eleventh International Conference on Ion Implantation Technology, Austin, Texas, USA, June 16-21, 1996 / editors, Emi Ishidida [sic] [and others].
Author
International Conference on Ion Implantation Technology (11th : 1996 : Austin, Tex.)
Publication
Piscataway, NJ : Institute of Electrical and Electronics Engineers, [1997], ©1997.

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StatusFormatAccessCall NumberItem Location
TextRequest in advance TK7871.85 .I57623 1996Off-site

Details

Additional Authors
  • Ishida, Emi.
  • SEMATECH (Organization)
Description
xxvii, 832 pages : illustrations; 28 cm
Subjects
Note
  • "96TH8182"--Cover.
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
078033289X
LCCN
96075709
OCLC
ocm37331438
Owning Institutions
Columbia University Libraries