Research Catalog
Microsystem technology and microrobotics
- Title
- Microsystem technology and microrobotics / S. Fatikow, U. Rembold.
- Author
- Fatikow, S. (Sergej), 1960-
- Publication
- Berlin ; New York : Springer, [1997], ©1997.
Items in the Library & Off-site
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1 Item
| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
| Text | Request in advance | TJ163 .F38 1997 | Off-site |
Holdings
Details
- Additional Authors
- Rembold, Ulrich.
- Description
- xii, 408 pages : illustrations; 25 cm
- Subjects
- Bibliography (note)
- Includes bibliographical references (p. [366]-401) and index.
- Contents
- 1. Ideas and Problems of Microsystem Technology and Microrobotics -- 2. Microsystems Technology Applications -- 3. Techniques of Microsystem Technology -- 4. Key Processes to Produce Micromechanical Components -- 5. Microactuators: Principles and Examples -- 6. Microsensors: Principles and Examples -- 7. MST and Information Processing -- 8. Microrobotics.
- ISBN
- 3540606580 (hc : alk. paper)
- LCCN
- 96053992
- OCLC
- ocm36143623
- Owning Institutions
- Columbia University Libraries