Research Catalog

Microsystem technology and microrobotics

Title
Microsystem technology and microrobotics / S. Fatikow, U. Rembold.
Author
Fatikow, S. (Sergej), 1960-
Publication
Berlin ; New York : Springer, [1997], ©1997.

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Details

Additional Authors
Rembold, Ulrich.
Description
xii, 408 pages : illustrations; 25 cm
Subject
  • Electromechanical devices > Design and construction
  • Microfabrication
  • Robotics
Bibliography (note)
  • Includes bibliographical references (p. [366]-401) and index.
Contents
1. Ideas and Problems of Microsystem Technology and Microrobotics -- 2. Microsystems Technology Applications -- 3. Techniques of Microsystem Technology -- 4. Key Processes to Produce Micromechanical Components -- 5. Microactuators: Principles and Examples -- 6. Microsensors: Principles and Examples -- 7. MST and Information Processing -- 8. Microrobotics.
ISBN
3540606580 (hc : alk. paper)
LCCN
96053992
OCLC
ocm36143623
Owning Institutions
Columbia University Libraries