Research Catalog

Title

Laser applications in microelectronic and optoelectronic manufacturing II : 10-12 February, 1997, San Jose, California / Jan J. Dubowski, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering.

Publication

Bellingham, Washington : SPIE, [1997], ©1997.

Items in the Library & Off-site

Holdings

Details

Additional Authors

• Dubowski, J. J.
• Society of Photo-optical Instrumentation Engineers.

Description

ix, 294 pages : illustrations; 28 cm.

Series Statement

Proceedings / SPIE--the International Society for Optical Engineering ; v. 2991

Uniform Title

Proceedings of SPIE--the International Society for Optical Engineering ; v. 2991.

Subject

• Lasers > Industrial applications > Congresses

Bibliography (note)

• Includes bibliographical references and author index.

Contents

• Desorption of positive ions and plume formation from laser irradiation of ionic crystals / J. T. Dickinson, D. R. Ermer and J.-J. Shin [et al.] -- Energy transfer in the laser ablation of metals / G. P. Pinho, G. Callies and H. Schittenhelm [et al.] -- Laser-assisted surface modification of thin chromium films / D. A. Willis, X. Xu and C. C. Poon [et al.] -- Structuring of dielectric and metallic materials with ultrashort laser pulses between 20 fs and 3 ps / J. Kruger, W. Kautek and M. Lenzner [et al.] -- Pulsed laser deposition of boron carbide: spectroscopic study of laser ablation plasma / O. N. Derkach, S. Pentzien and W. Kautek -- Photochemical reactions in silicon nitride with ArF excimer laser / K. Kurosawa, P. R. Herman and Y. Takigawa [et al.] -- XPS study of laser-assisted etching of InP in a chlorine atmosphere / J. M. Wrobel, C. E. Moffitt and D. M. Wieliczka [et al.] -- Si photoepitaxy induced by synchrotron radiation / Y. Utsumi --
• Effects of laser and particle beams on the synthesis and nonlinear optical response of nanostructures / R. F. Haglund, Jr., C. N. Afonso and G. Battaglin [et al.] -- Direct-write UV-laser microfabrication of 3D structures in lithium-alumosilicate glass / W. W. Hansen, S. W. Janson and H. Helvajian -- A comparative study of laser- and ion implantation-induced quantum well intermixing in GaInAsP/InP microstructures / J. J. Dubowski, S. Charbonneau and A. P. Roth [et al.] -- Innovative applications of laser technology in photovoltaics / L. Pirozzi, U. Besi-Vetrella and E. Salza -- Laser microchemical technology: new tools for microsystem engineering, debug, and failure analysis / S. Silverman, R. J. Aucoin and J. Mallat [et al.] -- In-situ photoluminescence mapping of industrial IR-sensitive film structures / S. C. Stafeev and M. S. Kosyakov -- Excimer laser ablation of polyimide: a 14-year IBM perspective / J. H. Brannon and T. A. Wassick --
• Ablation of ceramics by UV, visible, and IR pulsed laser radiation / V. I. Konov, F. Dausinger and S. V. Garnov [et al.] -- Rapid fabrication of diffractive optical elements by excimer laser micromachining / M. T. Duignan and G. P. Behrmann -- Laser machining of single-mode rib waveguides on germanosilicate slabs / P. R. Herman, J. Yang and K. Kurosawa [et al.] -- Laser depth-controlled precision machining of advanced ceramics / S. K. Nikumb and M. U. Islam -- Micromachining of microelectronic materials with deep-UV lasers / H. K. Tonshoff, F. von Alvensleben and H. Kappel [et al.] -- Multiple-watt ultraviolet power from a diode-pumped solid state laser at 1-kHz repetition rate / U. Stamm, W. Zschocke and B. K. Nikolaus [et al.] -- The growth of Si[subscript 1-y]C[subscript y]/Si and Si[subscript 1-x-y]Ge[subscript x]C[subscript y]/Si heterostructures by ion implantation and pulsed excimer laser-induced epitaxy / E. Fogarassy, A. Grob and J.-J. Grob [et al.] --
• Laser micromachining: a promise of cost-effective solutions in microelectronic manufacturing / R. D. Schaeffer and J. Angell -- Laser processes for multichip module's high-density multilevel thin film packaging / R. S. Patel and T. A. Wassick -- Pulsed laser deposition of high-temperature superconducting and metallic thin films for novel three-terminal device applications / G. M. Daly, D. B. Chrisey and J. M. Pond [et al.] -- Pulsed laser deposition of ferroelectric thin films for active microwave electronic devices / J. S. Horwitz, D. B. Chrisey and A. C. Carter [et al.] -- Pulsed laser deposition of ferroelectric thin films / S. Sengupta, S. H. McKnight and L. C. Sengupta -- Dielectric nonlinearity and loss in ferroelectric thin films / X. X. Xi -- Formation of Ti:sapphire thin films on single-crystal sapphire and GaAs substrates by pulsed laser deposition / P. A. Atanasov, R. I. Tomov and Z. Y. Peshev [et al.] --
• Laser-controlled moving atomic structures for microelectronics / N. M. Sovetov, A. V. Nikonov and E. V. Naumova [et al.] -- Preparation of Y[subscript 3]Fe[subscript 5]O[subscript 12] and Mn-Zn ferrite thin films by excimer laser ablation / P. A. Atanasov, M. E. Koleva and R. I. Tomov.

ISBN

0819424021

OCLC

ocm37004958

Owning Institutions

Columbia University Libraries