Research Catalog

1997 2nd International Symposium on Plasma Process-Induced Damage : 13-14 May 1997, Monterey, California, USA

Title
1997 2nd International Symposium on Plasma Process-Induced Damage : 13-14 May 1997, Monterey, California, USA / Kin P. Cheung, Moritaka Nakamura, and Calvin T. Gabriel, editors ; technical co-sponsors, IEEE/Electron Devices Society, American Vacuum Society, Japanese Society of Applied Physics.
Author
International Symposium on Plasma Process-Induced Damage (2nd : 1997 : Monterey, Calif.)
Publication
Sunnyvale, CA : Northern California Chapter of the American Vacuum Society, [1997], ©1997.

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Holdings

Details

Additional Authors
  • Cheung, Kin P.
  • Nakamura, Moritaka.
  • Gabriel, Calvin T.
  • IEEE Electron Devices Society.
  • American Vacuum Society.
  • Ōyō Butsuri Gakkai.
Description
i, 259 pages : illustrations; 28 cm
Alternative Title
  • P2ID
  • 2nd International Symposium on Plasma Process-Induced Damage
Subjects
Note
  • "IEEE catalog no. 97TH8265"--T.p. verso.
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
  • 0965157717 (softbound)
  • 0780338227 (microfiche)
LCCN
97065930
OCLC
ocm37279184
Owning Institutions
Columbia University Libraries