Research Catalog

Advances in resist technology and processing XIV : 10-12 March, 1997, Santa Clara, California

Title
Advances in resist technology and processing XIV : 10-12 March, 1997, Santa Clara, California / Rʹegine G. Tarascon-Auriol, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SEMATECH.
Publication
Bellingham, Washington : International Society for Optical Engineering, [1997], ©1997.

Items in the Library & Off-site

Filter by

1 Item

StatusFormatAccessCall NumberItem Location
Request for On-site UseRequest Scan
How do I pick up this item and when will it be ready?
TextRequest in advance TK7874 .A25 1997gOff-site

Holdings

Details

Additional Authors
  • Tarascon-Auriol, Régine G.
  • Society of Photo-optical Instrumentation Engineers.
  • Semiconductor Equipment and Materials International.
  • SEMATECH (Organization)
Description
xv, 1028 pages : illustrations; 28 cm.
Series Statement
Proceedings SPIE--the International Society for Optical Engineering ; v. 3049
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3049.
Subject
Bibliography (note)
  • Includes bibliographic references and author index.
ISBN
0819424633
OCLC
ocm37380395
Owning Institutions
Columbia University Libraries