Research Catalog

Emerging lithographic technologies : 10-11 March 1997, Santa Clara, California

Title
Emerging lithographic technologies : 10-11 March 1997, Santa Clara, California / David E. Seeger, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and] SEMATECH.
Publication
Bellingham, Wash., USA : SPIE, [1997], ©1997.

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Holdings

Details

Additional Authors
  • Seeger, David E.
  • Society of Photo-optical Instrumentation Engineers.
  • Semiconductor Equipment and Materials International.
  • SEMATECH (Organization)
Description
ix, 412 pages : illustrations; 28 cm.
Series Statement
SPIE proceedings series ; v. 3048
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3048.
Subjects
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0819424625
OCLC
ocm37533590
Owning Institutions
Columbia University Libraries