Research Catalog

Optical microlithography X : 12-14 March, 1997, Santa Clara, California

Title
Optical microlithography X : 12-14 March, 1997, Santa Clara, California / Gene E. Fuller, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations SEMI--Semiconductor Equipment and Materials International, SEMATECH.
Publication
Bellingham, Washington : SPIE, [1997], ©1997.

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Details

Additional Authors
  • Fuller, Gene E.
  • Society of Photo-optical Instrumentation Engineers.
  • Semiconductor Equipment and Materials International.
  • SEMATECH (Organization)
Description
xi, 982 pages : illustrations; 28 cm.
Series Statement
SPIE proceedings series ; v. 3051
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3051.
Subjects
Bibliography (note)
  • Includes bibliographic references and author index.
ISBN
081942465X
OCLC
ocm37380356
Owning Institutions
Columbia University Libraries