Research Catalog

Journal of vacuum science & technology. an official journal of the American Vacuum Society.

Title: Journal of vacuum science & technology. B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society.
Publication: New York, N.Y. : Published for the Society by the American Institute of Physics, 1983-©1990.

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14 Items

Item details
Status	Vol/Date	Format	Access	Call Number	Item Location
Request for On-site Use Request Scan How do I pick up this item and when will it be ready?	v.8:pt.5-6:1990	Text	Use in library	TJ940 .J8262 v.8:pt.5-6:1990	Off-site
Request for On-site Use Request Scan How do I pick up this item and when will it be ready?	v.8:pt.1-4:1990	Text	Use in library	TJ940 .J8262 v.8:pt.1-4:1990	Off-site
Request for On-site Use Request Scan How do I pick up this item and when will it be ready?	v.7:no.5-6:1989	Text	Use in library	TJ940 .J8262 v.7:no.5-6:1989	Off-site
Request for On-site Use Request Scan How do I pick up this item and when will it be ready?	v.7:no.1-4:1989	Text	Use in library	TJ940 .J8262 v.7:no.1-4:1989	Off-site
Request for On-site Use Request Scan How do I pick up this item and when will it be ready?	v.6:pt.4-6:1988	Text	Use in library	TJ940 .J8262 v.6:pt.4-6:1988	Off-site
Request for On-site Use Request Scan How do I pick up this item and when will it be ready?	v.6:pt.1-3:1988	Text	Use in library	TJ940 .J8262 v.6:pt.1-3:1988	Off-site
Request for On-site Use Request Scan How do I pick up this item and when will it be ready?	v.5:pt.4-6:1987	Text	Use in library	TJ940 .J8262 v.5:pt.4-6:1987	Off-site
Request for On-site Use Request Scan How do I pick up this item and when will it be ready?	v.5:pt.1-3:1987	Text	Use in library	TJ940 .J8262 v.5:pt.1-3:1987	Off-site
Request for On-site Use Request Scan How do I pick up this item and when will it be ready?	v.4:pt.4-6:1986	Text	Use in library	TJ940 .J8262 v.4:pt.4-6:1986	Off-site
Request for On-site Use Request Scan How do I pick up this item and when will it be ready?	v.4:pt.1-3:1986	Text	Use in library	TJ940 .J8262 v.4:pt.1-3:1986	Off-site
Request for On-site Use Request Scan How do I pick up this item and when will it be ready?	v.3:pt.4-6:1985	Text	Use in library	TJ940 .J8262 v.3:pt.4-6:1985	Off-site
Request for On-site Use Request Scan How do I pick up this item and when will it be ready?	v.3:no.1-3:1985	Text	Use in library	TJ940 .J8262 v.3:no.1-3:1985	Off-site
Request for On-site Use Request Scan How do I pick up this item and when will it be ready?	v.2:1984	Text	Use in library	TJ940 .J8262 v.2:1984	Off-site
Request for On-site Use Request Scan How do I pick up this item and when will it be ready?	v.1:no.1-4:1983	Text	Use in library	TJ940 .J8262 v.1:no.1-4:1983	Off-site

Details

Additional Authors

Publication Date

2nd ser., v. 1, no. 1 (Jan.-Mar. 1983)-2nd ser., v. 8, no. 6 (Nov./Dec. 1990).

Description

8 volumes : illustrations; 29 cm

Alternative Title

J. vac. sci. technol., B Microelectron. process. phenom.
Journal of vacuum science & technology. B, Microelectronics processing and phenomena
Journal of vacuum science and technology. B, Microelectronics processing and phenomena
Microelectronics processing and phenomena

Subject

Vacuum technology > Periodicals

Note

Title from cover.

Indexed In (note)

Computer & control abstracts
Electrical & electronics abstracts
Physics abstracts. Science abstracts. Series A
SPIN
Chemical abstracts
Coal abstracts
Current physics index
Metals abstracts
World aluminum abstracts

Additional Formats (note)

Issued also on microfilm.

Linking Entry (note)

Includes: International Symposium on Electron, Ion, and Photon Beams. Proceedings of the ... International Symposium on Electron, Ion, and Photon Beams; and: Molecular Beam Epitaxy Workshop. Proceedings of the ... Molecular Beam Epitaxy Workshop, also issued separately.

ISSN

0734-211X

LCCN

83642371

OCLC

ocm08697479
SCSB-2290559

Owning Institutions

Columbia University Libraries