Research Catalog

Advanced metallization and interconnect systems for ULSI applications in ...

Title
Advanced metallization and interconnect systems for ULSI applications in ...
Publication
Pittsburgh, Pa. : Materials Research Society

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2002TextRequest in advance TK7871.15.T85 W66 2002Off-site
2001TextRequest in advance TK7871.15.T85 W66 2001Off-site
2000TextRequest in advance TK7871.15.T85 W66 2000Off-site
1999TextRequest in advance TK7871.15.T85 W66 1999Off-site
1998TextRequest in advance TK7871.15.T85 W66 1998Off-site
1997TextRequest in advance TK7871.15.T85 W66 1997Off-site
1996TextRequest in advance TK7871.15.T85 W66 1996Off-site
1995TextRequest in advance TK7871.15.T85 W66 1995Off-site

Holdings

Details

Additional Authors
University of California, Berkeley. Continuing Education in Engineering.
Publication Date
Began with 1995.
Description
volumes : illustrations; 24 cm.
Series Statement
Materials Research Society conference proceedings
Uniform Title
Materials Research Society conference proceedings.
Subject
  • Integrated circuits > Design and construction > Congresses
  • Vapor-plating > Congresses
  • Electrochemical metallizing > Congresses
  • Dielectrics > Congresses
  • Titanium nitride > Congresses
Note
  • Description based on: 1996.
Issued By (note)
  • Contains papers presented at annual conference, sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley.
ISSN
1048-0854
OCLC
  • ocm37788210
  • SCSB-3529734
Owning Institutions
Columbia University Libraries