Research Catalog

Proceedings of the Symposium on Environmental Aspects of Electrochemical Technology : Applications in Electronics

Title: Proceedings of the Symposium on Environmental Aspects of Electrochemical Technology : Applications in Electronics / editors, Madhav Datta, James M. Fenton, Eric W. Brooman.
Author: Symposium on Environmental Aspects of Electrochemical Technology: Applications in Electronics (1996 : San Antonio, Tex.)
Publication: Pennington, NJ : Electrochemical Society, [1997], ©1997.

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Description

viii, 296 pages : illustrations; 24 cm.

Series Statement

Proceedings (Electrochemical Society) ; v. 96-21

Uniform Title

Proceedings (Electrochemical Society) ; v. 96-21.

Alternative Title

Environmental aspects of electrochemical technology : applications in electronics

Subjects

Note

"The Symposium ... was held October 7-8, 1996 in San Antonio as a part of the 190th Meeting of the Electrochemical Society."--Pref.
"Electrodeposition and Industrial Electrolysis and Electrochemical Engineering Divisions."

Bibliography (note)

Includes bibliographical references and indexes.

Contents

1. Recovery, Reuse and Recycle of Water in Semiconductor Water Fabrication / J. DeGenova and F. Shadman -- 2. In-Process Recycling of Plating Waste Water with a Novel Electrochange Recovery System / C. D. Zhou, E. J. Taylor and E. C. Stortz [et al.] -- 3. Recycling of Copper Using Electrodyalysis Ion Exchange / S. Sung and J. M. Fenton -- 4. Chemical Risk Assessment in the Product Development Cycle / P. M. Connors and G. S. Dripps -- 5. Cleaning Optimization for Reduced Chemical Usage / P. J. Resnick, R. J. Simonson and G. C. Nelson [et al.] -- 6. Cleaning Technology in Semiconductor Device Manufacturing: Approaches to Environmentally Responsible Processing / J. M. Rosamillia, T. Boone and G. S. Higashi -- 7. Assessment of Dry Technologies for Removing Particles from Waters / R. F. Hicks, W. K. Au and P. Randall -- 8. PFC Emissions Reduction using a One Step Clean Optimization Process on an Applied Materials P5000 TEOS System / T. Streif, G. DePinto and S. Dunnigan --
9. Unusual Semiconductor Environmental Sensors for the Photoelectrochemical Detection of Cyanide / S. Licht and N. Myung -- 10. Detection of Surfactants in Rinse Water using a Quartz Crystal Microbalance Technique / K. T. Lee, S. Raghavan and V. Mathew -- 11. Real-Time Monitoring of Wet Chemical Oxidation and Etching Processes on Semiconductor Surfaces for Process Optimization and Waste Minimization / H. F. Okorn-Schmidt, I. Teerlinck and S. Biesemans [et al.] -- 12. A Unique Electrodeposition Process of a Lead-Free-Solder - Pure Tin / Y. Zhang and J. A. Abys -- 13. Developments for More Environmentally Benign Electrodeposition Technology / K. G. Sheppard -- 14. Specific Multilayer Surface Finishes for Leadframe Applications / C. Fan, I. Kadija and J. Abys [et al.] -- 15. Some Environmentally Conscious Processes in Electronic Applications / C. J. Sambucetti, M. Paunovic and R. Saraf [et al.] --
16. Environmentally Preferred Alternatives to Cadmium Coatings for Electrical/Electronic Applications / E. W. Brooman, D. A. Schario and M. L. Klingenberg -- 17. Environmentally Benign Silicon Etching in the Absence of Free Fluoride / M. M. Rieger, J. C. Flake and P. A. Kohl -- 18. Optimized HF Solutions in ULSI Technology / I. Teerlinck, P. W. Mertens and R. Vos [et al.] -- 19. Recovery of Invar Waste Solutions / J. J. Moscony -- 20. Hazardous Waste Reduction Through Electrochemical Micromachining / D. Harris, D. Brophy and M. Datta.

ISBN

1566771714

OCLC

ocm37662328

Owning Institutions

Columbia University Libraries