Research Catalog

Title

Semiconductor technology : processing and novel fabrication techniques / edited by Mikhail E. Levinshtein, Michael S. Shur.

Publication

New York : John Wiley, [1997], ©1997.

Items in the Library & Off-site

Holdings

Details

Additional Authors

• Levinshteĭn, M. E. (Mikhail Efimovich)
• Shur, Michael.

Description

xviii, 240 pages : illustrations; 24 cm

Summary

• Drawing on decades of Russian semiconductor research, this remarkable book makes available a great many Si and III-V semiconductor technologies that are practically unknown in the West. Often simpler and cheaper than conventional Western methods, these approaches will enable researchers to improve the quality of semiconductor materials and fabricate new types of devices.
• After a general introduction to semiconductor technology, the book describes transmutation doping, which offers all the advantages of neutron doping, permits controlled doping depth from 0.1 micron to 1mm, and offers the option of forming deep channels. Also presented is a novel technique using polymer spinon diffusant films for a uniform and reproducible introduction of impurities into silicon.
• Researchers and graduate students in solid state physics, device physics, materials science, and electrical engineering will find a wealth of original, stimulating, and valuable information in this unique manual.

Subjects

• Semiconductors > Defects
• Semiconductor doping

Note

• "A Wiley-Interscience publication."

Bibliography (note)

• Includes bibliographical references and index.

Contents

1. Introduction to Semiconductor Technology / E. G. Guk and N. M. Shmidt -- 2. Transmutation Doping of Semiconductors by Charged Particles / V. V. Kozlovskii and L. F. Zakharenkov -- 3. Polymer Diffusants in Semiconductor Technology / E. G. Guk, A. V. Kamanin and N. M. Shmidt [et al.] -- 4. Rare-Earth Elements in the Technology of III-V Compounds / L. F. Zakharenkov, V. V. Kozlovskii and A. T. Gorelenok [et al.] -- 5. Intrinsic Point Defect Engineering in Silicon High-Voltage Power Device Technology / N. A. Sobolev -- 6. Isovalent Impurity Doping of Direct-Gap III-V Semiconductor Layers / V. V. Chaldyshev and S. V. Novikov -- 7. Surface Passivation of III-V Compounds by Inorganic Dielectrics and Polyimides / A. T. Gorelenok, N. D. Ilyinskaya and I. A. Mokina [et al.] -- 8. Precision Profiling of Semiconductor Surfaces by Photochemical Etching / D. N. Goryachev, L. V. Belyakov and O. M. Sreseli.

ISBN

0471127922 (cloth : alk. paper)

LCCN

97001734

OCLC

ocm36327317

Owning Institutions

Columbia University Libraries