Research Catalog

Microelectronic device technology : 1-2 October 1997, Austin, Texas

Title
Microelectronic device technology : 1-2 October 1997, Austin, Texas / Mark Rodder [and others], chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, [and] The Electrochemical Society.
Publication
Bellingham, Wash., USA : SPIE, [1997], ©1997.

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Details

Additional Authors
  • Rodder, Mark.
  • Society of Photo-optical Instrumentation Engineers.
  • Semiconductor Equipment and Materials International.
  • Solid State Technology.
  • Electrochemical Society.
Description
ix, 398 pages : illustrations; 28 cm.
Series Statement
SPIE proceedings series ; v. 3212
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3212.
Subjects
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
081942644X
OCLC
ocm37745555
Owning Institutions
Columbia University Libraries