Research Catalog
Fundamentals of microfabrication
- Title
- Fundamentals of microfabrication / Marc Madou.
- Author
- Madou, Marc J.
- Publication
- Boca Raton, Fla. : CRC Press, [1997], ©1997.
Items in the Library & Off-site
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1 Item
| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
| Text | Request in advance | TK7836 .M33 1997 | Off-site |
Holdings
Details
- Description
- 589 pages, 22 unnumbered pages of plates : illustrations (some color); 29 cm
- Subjects
- Bibliography (note)
- Includes bibliographical references (p. 565-569) and index.
- Contents
- Ch. 1. Lithography -- Ch. 2. Pattern Transfer with Dry Etching Techniques -- Ch. 3. Pattern Transfer with Additive Techniques -- Ch. 4. Wet Bulk Micromachining -- Ch. 5. Surface Micromachining -- Ch. 6. LIGA -- Ch. 7. Comparison of Micromachining Techniques -- Ch. 8. Micromachine Development and Packaging -- Ch. 9. Scaling Laws, Actuators, and Power in Miniaturization -- Ch. 10. Microfabrication Applications -- App. A. Metrology Techniques for MEMS.
- ISBN
- 0849394511 (acid-free paper)
- LCCN
- 96043344
- OCLC
- 35397909
- ocm35397909
- Owning Institutions
- Columbia University Libraries