Research Catalog

Design and fabrication of a surface micromachined positioning device

Title
Design and fabrication of a surface micromachined positioning device / door Johannes Frans Lodewijk Goosen.
Author
Goosen, Johannes Frans Lodewijk, 1966-
Publication
Delft, Netherlands : Delft University Press, 1996.

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StatusFormatAccessCall NumberItem Location
TextRequest in advance QC176.8.M5 G667 1996gOff-site

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Details

Description
x, 205 pages : illustrations; 24 cm
Alternative Title
Surface micromachined positioning device
Subjects
Note
  • Includes vita.
Thesis (note)
  • Thesis (doctoral)--Technische Universiteit Delft, 1996.
Bibliography (note)
  • Includes bibliographical references (p. 203-204).
Language (note)
  • Text in English; summaries in English and Dutch.
ISBN
9040713901
OCLC
ocm37340899
Owning Institutions
Columbia University Libraries