Research Catalog

Title

Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas / Shih-Chia Chang, Stella W. Pang, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, [and] NIST--National Institute of Standards and Technology ; cooperating organization, Solid State Technology.

Publication

Bellingham, Wash., USA : SPIE, [1997], ©1997.

Items in the Library & Off-site

Holdings

Details

Additional Authors

• Pang, Stella W.
• Chang, Shih-Chia.
• Society of Photo-optical Instrumentation Engineers.
• Semiconductor Equipment and Materials International.
• National Institute of Standards and Technology (U.S.)
• Solid State Technology.

Description

ix, 310 pages : illustrations; 28 cm.

Series Statement

SPIE proceedings series ; v. 3223

Uniform Title

Proceedings of SPIE--the International Society for Optical Engineering ; v. 3223.

Subject

• Micromachining > Congresses
• Microfabrication > Congresses
• Electromechanical devices > Design and construction > Congresses

Contents

• Microfabrication technologies for microsystems / N. F. de Rooij -- SAMPLE (Sandia agile MEMS prototyping, layout tools, and education) / C. Craig Barron, B. R. Davies and J. J. Sniegowski [et al.] -- IC-compatible fabrication of through-wafer conductive vias / J. Gobet, J.-P. Thiebaud and F. Crevoisier [et al.] -- Fabrication techniques and their application to produce novel micromachined structures and devices using excimer laser projection / E. C. Harvey and P. T. Rumsby -- Micromachining of metals and ceramics by nano- and picosecond laser radiation / J. Jandeleit, A. Horn and E. W. Kreutz [et al.] -- Precise micronanomachining for advanced sensors / M. Esashi, T. Ono and K. Minami -- Wide-bandwidth silicon nitride membrane microphones / B. T. Cunningham and J. J. Bernstein -- Development of a silicon microprobe for NO detection / M. B. A. Fontes, J. J. Santiago-Aviles and R. Furlan --
• Wet chemical isotropic etching procedures of silicon: a possibility for the production of deep-structured microcomponents / N. Schwesinger and A. Albrecht -- Microcomposite electroforming for MEMS technology / S.-H. Yeh, C.-Y. Liue and J.-W. Wang [et al.] -- New developments of process technologies for microfabrication / V. Piotter, T. Hanemann and R. Ruprecht [et al.] -- Growth and crystallinity of electroformed nickel structures / S.-C. Chang and J. Edens -- High-aspect-ratio etching in polymer for microactuator applications / W. Y. Lee, J. Gao and T. Hirano [et al.] -- Optical applications of silicon micromachining technology / G. R. Trott, L. Yang and K. Carey [et al.] -- Comprehensive study of processing parameters influencing the stress and stress gradient of thick polysilicon layers / M. Furtsch, M. Offenberg and H. Muenzel [et al.] --
• Optical interferometric characterization of membrane curvature in boron-doped Si microstructures / J. W. Weigold, W. H. Juan and S. W. Pang [et al.] -- Strain effects in multilayers / C. M. A. Ashruf, P. J. French and C. de Boer [et al.] -- Ion sputter deposition of shape memory alloy films for microactuators / S. T. Davies and K. Tsuchiya -- Ultraprecision microelectroforming of metals and metal alloys / H. Lowe, W. Ehrfeld and J. Diebel -- Microfabrication by through-mask electrochemical micromachining / M. Datta -- Single-sided multilevel structure for silicon pressure transducers by masked-maskless etching technology / H. Yang, J. Ren and M. Bao [et al.] -- Macroporous silicon formation for micromachining / H. Ohji, S. Lahteenmaki and P. J. French -- Focused ion-beam system for automated MEMS prototyping and processing / G. J. Athas, K. E. Noll and R. Mello [et al.] --
• 10-[mu]m thin GaAs membrane manufactured by nonselective etching / A. Muller, I. Petrini and V. Avramescu [et al.] -- Automotive applications for micromachining / D. R. Sparks and S.-C. Chang -- Assembly of hybrid microsystems in a large-chamber scanning electron microscope by use of mechanical grippers / M. Weck, J. Hummler and B. Petersen -- Material structure and processes required for the manufacture of micromechanical devices / K. J. Skrobis, J. Christenson and S. E. Staller [et al.] -- Micromechanical structures and microelectronics for acceleration sensing / B. R. Davies, S. Montague and J. H. Smith [et al.] -- Influence of processes and selective bonding technology / J. Jiao, A. Berthold and M. J. Vellekoop [et al.] -- Laser-micromachined microchannel solvent separator / D. W. Matson, P. M. Martin and W. D. Bennett [et al.] -- Design of bulk micromachined suspensions / W. Fang -- Anneal treatment studies of heavily boron-doped silicon / D. M. Bruce --
• Yield enhancement in micromechanical sensor fabrication using statistical process control / J. T. Borenstein and D. M. Preble -- Structure design and fabrication of symmetric force-balance micromachining capacitive accelerometer / Q. Zou, D. Lu and B. Li [et al.] -- Balance approach for mechanical properties test of microfabricated structures / X. Xiong, Q. Zou and D. Lu [et al.] -- Micromachining technology development in SIOFM / R. Wang, B. Shen and H. Ding.

ISBN

0819426555

OCLC

ocm37826172

Owning Institutions

Columbia University Libraries