Research Catalog

Handbook of thin film process technology

Title
Handbook of thin film process technology / editors, David A. Glocker, S. Ismat Shah.
Publication
Bristol, UK ; Philadelphia : Institute of Physics Pub., [1995], ©1995.

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Additional Authors
  • Glocker, David A.
  • Shah, S. Ismat.
Description
1 volume (various pagings) : illustrations; 31 cm
Alternative Title
Thin film process technology
Subjects
Bibliography (note)
  • Includes bibliographical references and indexes.
ISBN
0750303115
LCCN
95237129
OCLC
ocm33093216
Owning Institutions
Columbia University Libraries