Research Catalog

IEEE, the Eleventh Annual International Workshop on Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and systems, January 25-29, 1998, Heidelberg, Germany

Title
IEEE, the Eleventh Annual International Workshop on Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and systems, January 25-29, 1998, Heidelberg, Germany / sponsored by the IEEE Robotics and Automation Society ; in cooperation with the ASME Dynamic Systems and Control Division and the Ministry of Economic Affairs of Baden-Württemberg.
Author
IEEE Workshop on Micro Electro Mechanical Systems (11th : 1998 : Heidelberg, Germany)
Publication
[New York, N.Y.] : Institute of Electrical and Electronics Engineers ; Piscataway, NJ : IEEE Service Center, [1998], ©1998.

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Details

Additional Authors
  • IEEE Robotics and Automation Society.
  • American Society of Mechanical Engineers. Dynamic Systems and Control Division.
  • Baden-Württemberg (Germany). Wirtschaftsministerium.
Description
xxx, 666 pages : illustrations; 30 cm
Alternative Title
  • Proceedings
  • 1998 IEEE Micro Electro Mechanical Systems
  • Eleventh Annual International Workshop on Micro Electro Mechanical Systems
  • 11th Annual International Workshop on Micro Electro Mechanical Systems
  • Investigation of micro structures, sensors, actuators, machines and systems
  • Micro Electro Mechanical Systems
  • MEMS 98
Subjects
Note
  • "IEEE catalog number 98CH36176."
Bibliography (note)
  • Includes bibliographical references and indexes.
ISBN
  • 078034412X (softbound)
  • 0780344138 (casebound)
  • 0780344146 (microfiche)
OCLC
  • 40135525
  • ocm40135525
Owning Institutions
Columbia University Libraries