Research Catalog

Title

Materials for mechanical and optical microsystems : symposium held December 4-5, 1996, Boston, Massachusetts, U.S.A. / editors, Michael L. Reed [and others].

Publication

Pittsburgh, Pa. : Materials Research Society, [1997], ©1997.

Items in the Library & Off-site

Holdings

Details

Additional Authors

Reed, Michael L.

Description

ix, 242 pages : illustrations; 24 cm.

Series Statement

Materials Research Society symposium proceedings ; v. 444

Uniform Title

Materials Research Society symposia proceedings ; v. 444.

Subject

• Microelectronics > Materials > Congresses
• Electromechanical devices > Materials > Congresses
• Thin films > Congresses
• Optical films > Congresses

Bibliography (note)

• Includes bibliographical references and indexes.

Contents

• Materials Research Society Symposium Proceedings -- Technology for Microassembling / S. Johansson -- Hard Quasiamorphous Carbon - A Prospective Construction Material for Micro-Electro-Mechanical Systems / Benjamin F. Dorfman, P. Asoka-Kumar and Fred H. Pollak [et al.] -- Polymers for Optical-Communications Device Fabrication Optical Adhesives and Polyimide Waveguides / T. Maruno -- Mechanical and Thermophysical Properties of Thin Film Materials for MEMS: Techniques and Devices / E. Obermeier -- Piezoelectric Force Sensing Pb(Zr,Ti)O[subscript 3] Microcantilever Array for Multiprobe Scanning Force Microscopy / T. Itoh, C. Lee and J. Chu [et al.] -- Selective Electroless Copper Metallization of Epoxy Substrates / L. M. Campion, M. O'Reilly and D. J. Macauley [et al.] -- Design and Properties of a Thin-Film, MEMS-Based Magnetostrictive Magnetometer / T. J. Kistenmacher, R. Osiander and S. A. Ecelberger [et al.] --
• XRD and XTEM Investigation of Polycrystalline Silicon Carbide on Polycrystalline Silicon / S. Roy, C. A. Zorman and C. H. Wu [et al.] -- Improved Autoadhesion Measurement Method for Micromachined Polysilicon Beams / Maarten P. de Boer and Terry A. Michalske -- Elastic Properties of Diamondlike Carbon Thin Films: A Brillouin Scattering Study / O. R. Monteiro, I. G. Brown and R. Sooryakumar [et al.] -- Hardening of Nickel Alloys by Ion Implantation of Titanium and Carbon / S. M. Myers, D. M. Follstaedt and J. A. Knapp [et al.] -- Patterned Sol-Gel Structures by Micro Molding in Capillaries / M. J. Lochhead and P. Yager -- Measurements of Residual Stresses in Low-Stress Silicon Nitride Thin Films Using Micro-Rotating Structures / Xin Zhang, Yitshak Zohar and Tong-Yi Zhang -- Thermal Conductivity of CVD-Diamond Films Between 80 and 700 K / E. Jansen, M. Schneider and E. Obermeier --
• A Study of Hermetic Glass Sealing Using a Modified Direct Bonding Method / B. K. Ju, C. G. Ko and Y. H. Lee [et al.] -- Influence of the Structural Parameters of Polysilicon Films on the Piezoresistive Properties at High Temperature / P. Kleimann, B. Semmache and M. Le Berre [et al.] -- Effect of Thermoelastic Stress on the Pressure Response of a Composite SiO[subscript 2]/Si Membrane / C. Malhaire, M. Le Berre and D. Barbier -- Fabrication Processes and Characteristics of Microelectromechanical System Using PZT Films / Y. S. Yoon, J. H. Kim and T. H. Lim [et al.] -- Optical Waveguiding (Pb,La)(Zr,Ti)O[subscript 3] Thin Films Prepared by Pulsed Laser Deposition / S. B. Xiong, Z. G. Liu and X. Y. Chen [et al.] -- Pulsed laser Deposition and Acoustic Property of Piezoelectric/Nonpiezoelectric Multilayer Films / W. S. Hu, Z. G. Liu and Y.-F. Chen [et al.] -- Charge Trapping and Degradation Properties of PZT Thin Films for MEMS / Hyeon-Seag Kim, D. L. Polla and S. A. Campbell --
• A Low Temperature Direct Bonding Method Using an Electron-Beam Evaporated Silicon-Oxide Interlayer / H. W. Park, B. K. Ju and Y. H. Lee [et al.] -- Experimental Analysis of the Process of Anodic Bonding Using an Evaporated Glass Layer / W. B. Choi, B. K. Ju and Y. H. Lee [et al.] -- Micro-Raman Study of Stress Distribution and Thermal Relaxation of Oxidized Silicon Membranes / C. Malhaire, Y. Guyot and M. Le Berre [et al.] -- A New Technique for Measuring Poisson's Ratio of MEMS Materials / W. N. Sharpe, Jr., K. R. Vaidyanathan and Bin Yuan [et al.] -- Photoconductivity in Vacuum Deposited Films of Silicon-Based Polymers / H. Okumoto, M. Shimomura and N. Minami [et al.] -- Structural Characterization of p++ Si:B Layers for Bulk Micromachining / K. C. Wu, P. A. Shay and J. T. Borenstein [et al.] -- Silicon Microhotplate Arrays as a Platform for Efficient Gas Sensing Thin Film Research / F. Dimeo, Jr., S. Semancik and R. E. Cavicchi [et al.] --
• Mechanical Behavior of a MEMS Acoustic Emission Sensor / D. F. Bahr, J. S. Wright and L. F. Francis [et al.] -- Characterization of the Piezoelectric Response of Aluminum Nitride Grown by DC Magnetron Sputtering for Applications in Thin-Film Resonators / Rajan S. Naik, Joseph J. Lutsky and Rafael Reif [et al.] -- The Effect of Inorganic Thin Film Material Processing and Properties on Stress in Silicon Piezoresistive Pressure Sensors / G. Bitko, A. C. McNeil and D. J. Monk -- Titanium-Nickel Shape Memory Thin Film Actuators for Micromachined Valves / H. Kahn, W. L. Benard and M. A. Huff [et al.] -- Development of Micromirror Using Piezoelectric Excited and Actuated Structures / R. Maeda, C. Lee and A. Schroth.

ISBN

1558993487

LCCN

97006201

OCLC

• 36407768
• ocm36407768

Owning Institutions

Columbia University Libraries