Research Catalog

Title

Flatness, roughness, and discrete defects characterization for computer disks, wafers, and flat panel displays II : 29-30 January 1998, San Jose, California / John C. Stover, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering.

Publication

Bellingham, Wash., USA : SPIE, [1998], ©1998.

Items in the Library & Off-site

Holdings

Details

Additional Authors

• Stover, John C.
• Society of Photo-optical Instrumentation Engineers.

Description

vii, 186 pages : illustrations; 28 cm.

Series Statement

SPIE proceedings series ; v. 3275

Uniform Title

Proceedings of SPIE--the International Society for Optical Engineering ; v. 3275.

Subjects

• Semiconductor wafers > Measurement > Congresses
• Flatness measurement > Congresses
• Surface roughness > Measurement > Congresses

Bibliography (note)

• Includes bibliographical references and index.

Contents

• Novel method for beam collimation using multiple-beam shearing interferometry / K. Matsuda, M. Roy and P. W. Fekete -- New software algorithm of 3D surface profile measurement based on phase-shift interfering technology / B. Liu, J. Fan and L. Yang [et al.] -- New 3D surface profile measurement based on phase-shift interfering technology / B. Liu, L. Yang and J. Fan [et al.] -- Electrostatically actuated stylus profiler with capacitive displacement sensing in vertical and lateral directions / M. Kearny and B. J. Furman -- Round robin determination of power spectral densities of different Si wafer surfaces / E. Marx, I. J. Malik and Y. E. Strausser [et al.] -- Comparison of surface PSDs calculated from both AFM profiles and scatter data / J. C. Stover, V. I. Ivakhnenko and C. A. Scheer -- Statistical process control by employing circular and spherical statistics for the interpretation of BRDF measurements / H. Rothe, D. Hueser and A. Kasper --
• Characteristics of a high-resolution displacement sensor using mode interference in the optical waveguide / Y. Iwasaki, M. Doi and T. Shionoya [et al.] -- X-ray scanner for the visualization of the spatial distribution of nanometer-scale roughness / V. V. Protopopov, K. A. Valiev and R. M. Imamov -- Characterization of laser zone texture with laser Doppler vibrometry / E. F. Cromwell, J. Adam and B. Clark [et al.] -- Measurement of roughness of optical surface by focal plane CCD camera / J. Li, X. Li and A. Ying [et al.] -- Surface particle detection for the 0.07-[mu]m generation and beyond / B. D. Buckner, L. Suresh and E. D. Hirleman -- Comparison of models and measurements of scatter from surface-bound particles / C. A. Scheer, J. C. Stover and V. I. Ivakhnenko -- Modeling of scatter from small pits of arbitrary shape / V. I. Ivakhnenko, C. A. Scheer and J. C. Stover --
• Application of bidirectional ellipsometry to the characterization of roughness and defects in dielectric layers / T. A. Germer -- Analysis and characterization of In-film defects generated during sputter deposition of aluminum-alloy films / M. Abburi, V. Pavate and S. Chiang [et al.] -- Use of new technology for enhanced detection of crystalline defects on silicon wafers / L. Dou, D. Kesler and R. Grose -- Scanning auger microscopy characterization of magnetic hard disks / J. R. Kingsley, D. W. Harris and D. L. Neiman [et al.] -- Rapid and accurate determination of transparency, conductivity, etchability, patternability, and manufacturability of ITO films / D. Bloom, G. G. Li and K. Zhang [et al.] -- Neural network approach to rapid thin film characterization / N. Jakatdar, X. Niu and C. J. Spanos -- Novel DUV photoresist modeling by optical thin film decomposition from spectral ellipsometry/reflectometry data / X. Niu, N. Jakatdar and C. J. Spanos --
• High-accuracy detection and data processing of NRRO of spindle motor for HDD / Z. Fan, J. Ni and Y. Huang [et al.].

ISBN

0819427144

OCLC

ocm38957879

Owning Institutions

Columbia University Libraries