Research Catalog

Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.

Title
Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A. / Tomas Diaz de la Rubia [and others].
Publication
Pittsburg, Pa. : Materials Research Society, [1997], ©1997.

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Details

Additional Authors
Diaz de la Rubia, Tomas.
Description
xv, 541 pages : illustrations; 24 cm.
Series Statement
Materials Research Society symposium proceedings, 0272-9172 ; v. 469
Uniform Title
Materials Research Society symposia proceedings ; v. 469.
Subjects
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
1558993738
LCCN
97036151
OCLC
  • 37457922
  • ocm37457922
Owning Institutions
Columbia University Libraries