Research Catalog

Title

Microcantilevers for atomic force microscope data storage / by Benjamin W. Chui.

Author

Chui, Benjamin W., 1969-

Publication

Boston, Mass. : Kluwer Academic Publishers, 1999.

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Holdings

Details

Description

xxiv, 148 pages : illustrations; 25 cm.

Summary

• Microcantilevers for Atomic Force Microscope Data Storage describes a research collaboration between IBM Almaden and Stanford University in which a new mass data storage technology was evaluated. This technology is based on the use of heated cantilevers to form submicron indentations on a polycarbonate surface, and piezoresistive cantilevers to read those indentations.
• The primary audience is industrial and academic workers in the microelectromechanical systems (MEMS) area. It will also be of interest to researchers in the data storage industry who are investigating future storage technologies.

Series Statement

Microsystems ; 2

Uniform Title

• Microsystems (Series) ; v. 2.
• Microsystems ; 2.

Subjects

• Scanning electron microscopes
• Optical storage devices

Bibliography (note)

• Includes bibliographical references (p. [129]-142) and index.

Contents

1. Introduction -- 2. Heater-cantilevers for writing: design, fabrication and basic characterization -- 3. Heater-cantilevers for writing: further characterization, modeling and optimization -- 4. Piezoresistive cantilevers for readback -- 5. Dual-axis piezoresistive cantilevers: design, fabrication and characterization -- 6. Dual-axis piezoresistive cantilevers for tracking: applications -- 7. Conclusion and future work -- App. 1. Heater-cantilever fabrication process -- App. 2. Piezoresistive cantilever fabrication process -- App. 3. Dual-axis piezoresistive cantilever fabrication process.

ISBN

0792383583 (alk. paper)

LCCN

98040855

OCLC

ocm39906118

Owning Institutions

Columbia University Libraries