Research Catalog

Ultraclean surface processing of silicon wafers : secrets of VLSI manufacturing

Title
Ultraclean surface processing of silicon wafers : secrets of VLSI manufacturing / Takeshi Hattori (ed.).
Publication
Berlin ; New York : Springer, [1998], ©1998.

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Details

Additional Authors
Hattori, Takeshi, 1945-
Description
xxviii, 616 pages : illustrations; 24 cm
Subjects
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
3540616721 (alk. paper)
LCCN
98010353
OCLC
ocm38494601
Owning Institutions
Columbia University Libraries