Research Catalog

Title

Spectroscopic ellipsometry and reflectometry : a user's guide / Harland G. Tompkins, William A. McGahan.

Author

Tompkins, Harland G.

Publication

New York : Wiley, [1999], ©1999.

Items in the Library & Off-site

Holdings

Details

Additional Authors

McGahan, William A., 1966-

Description

xiv, 228 pages : illustrations; 25 cm

Subject

• Ellipsometry
• Reflectometer
• Materials > Optical properties
• Thin films > Optical properties
• Surfaces (Technology)

Note

• "A Wiley-Interscience publication."

Bibliography (note)

• Includes bibliographical references and index.

Contents

• 1. Perspective and History -- 2. Fundamentals -- 3. Optical Properties of Materials and Layered Structures -- 4. Instrumentation -- 5. The Anatomy of a Reflectance Spectrum -- 6. Aspects of Single-Wavelength Ellipsometry -- 7. The Anatomy of an Ellipsometric Spectrum -- 8. Analytical Methods and Approach -- 9. Optical Data Analysis -- 10. Quality Assurance -- 11. Very Thin Films -- 12. Roughness -- Prototypical Analyses. 1. Thermal Oxide, LPCVD Nitride, or Photoresist on Silicon. 2. Silicon Oxynitrides, PECVD Silicon Oxides, and Polysilicon. 3. PECVD Silicon Nitride, Silicon Dioxide, and Photoresist on Silicon. 4. LPCVD Polysilicon and Amorphous Silicon. 5. Substrate Optical Constant Determination. 6. Analysis of Films on Transparent Substrates. 7. Very Thick Films. 8. Compositional Analysis of Materials. 9. Thin Metal Films. 10. Photoresist Optical Constants. A. Regression Algorithms -- B. Maxwell's Equations and the Wave Equation --
• C. Snell's Law, Fresnel's Equations, and the Total Reflection Coefficient Derivations and Historical Perspective.

ISBN

0471181722 (cloth)

LCCN

98038199

OCLC

ocm39546046

Owning Institutions

Columbia University Libraries