Research Catalog

1999 4th International Symposium on Plasma Process-Induced Damage : May 9-11, 1999, Monterey, California, USA

Title
1999 4th International Symposium on Plasma Process-Induced Damage : May 9-11, 1999, Monterey, California, USA / Thuy Dao, Mitsumasa Koyanagi, and Terence Hook, editors ; technical co-sponsors, IEEE/Electron Devices Society, American Vacuum Society, Japanese Society of Applied Physics.
Author
International Symposium on Plasma Process-Induced Damage (4th : 1999 : Monterey, Calif.)
Publication
Sunnyvale, CA : Northern California Chapter of the American Vacuum Society, [1999], ©1999.

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Details

Additional Authors
  • Dao, Leanne Thuy Lien, 1958-
  • Koyanagi, Mitsumasa.
  • Hook, Terence.
  • IEEE Electron Devices Society.
  • American Vacuum Society.
  • Ōyō Butsuri Gakkai.
Description
211 pages : illustrations; 28 cm
Alternative Title
  • 4th International Symposium on Plasma Process-Induced Damage
  • Fourth International Symposium on Plasma Process-Induced Damage
Subjects
Note
  • "IEEE catalog no. 99TH8395"--T.p. verso.
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0965157733 (softbound)
LCCN
98068111
OCLC
ocm41566698
Owning Institutions
Columbia University Libraries