Research Catalog

Bringing scanning probe microscopy up to speed

Title
Bringing scanning probe microscopy up to speed / by S.C. Minne, S.R. Manalis, C.F. Quate.
Author
Minne, S. C. (Stephen C.)
Publication
Boston : Kluwer, [1999], ©1999.

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TextRequest in advance QH212.S33 M56 1999Off-site

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Details

Additional Authors
  • Manalis, S. R. (Scott R.)
  • Quate, Calvin F., 1923-2019.
Description
173 pages : illustrations; 25 cm.
Summary
  • "Bringing Scanning Probe Microscopy up to Speed introduces the principles of scanning probe systems with particular emphasis on techniques for increasing speed. The authors include useful information on the characteristics and limitations of current state-of-the-art machines as well as the properties of the systems that will follow in the future. The basic approach is two-fold.
  • First, last scanning systems for single probes are treated and, second, systems with multiple probes operating in parallel are presented."--BOOK JACKET.
Series Statement
Microsystems ; 3
Uniform Title
Microsystems (Series) ; v. 3.
Subject
Bibliography (note)
  • Includes bibliographical references and index.
Contents
Ch. 1. Improving Conventional Scanning Probe Microscopes -- Ch. 2. Design of Piezoresistive Cantilevers with Integrated Actuators -- Ch. 3. Increasing the Speed of Imaging -- Ch. 4. Cantilevers with Interdigital Deflection Sensors -- Ch. 5. Operation of the Interdigital Cantilever -- Ch. 6. Cantilever Arrays -- Ch. 7. Scanning Probes for Information Storage and Retrieval -- Ch. 8. Silicon Process Flow: ZnO actuator and piezoresistive sensor -- Ch. 9. Silicon Process Flow: Interdigital Cantilever.
ISBN
0792384660 (alk. paper)
LCCN
99010284
OCLC
  • 40644852
  • ocm40644852
Owning Institutions
Columbia University Libraries