Research Catalog

Digest of papers.

Title
Digest of papers.
Author
International Microprocesses and Nanotechnology Conference.
Publication
[Piscataway, N.J.] : [IEEE]

Items in the Library & Off-site

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4 Items

StatusVol/DateFormatAccessCall NumberItem Location
(1999)TextRequest in advance QC176.8.M5 I57 (1999)Off-site
(2000)TextRequest in advance QC176.8.M5 I57 (2000)Off-site
(2001)TextRequest in advance QC176.8.M5 I57 (2001)Off-site
(2002)TextRequest in advance QC176.8.M5 I57 (2002)Off-site

Holdings

Details

Additional Authors
  • Ōyō Butsuri Gakkai.
  • Korean Vacuum Society.
  • IEEE Electron Devices Society.
Description
volumes : illustrations; 29 cm
Alternative Title
  • Digest of papers, microprocesses and nanotechnology 1999-
  • Microprocesses and nanotechnology
Subject
  • Microfabrication > Congresses
  • Nanotechnology > Congresses
Note
  • Description based on: July 13-16, 1998.
Additional Formats (note)
  • Also issued on the World Wide Web via IEEE Xplore.
Issued By (note)
  • Sponsored by Japan Society of Applied Physics and Korean Vacuum Society, <1998>; Japan Society of Applied Physics, IEEE Electron Devices Society, and others, 1999-
LCCN
2001261188
OCLC
  • ocm41259881
  • SCSB-3712661
Owning Institutions
Columbia University Libraries