Research Catalog

Optical microlithography XI : 25-27 February, 1998, Santa Clara, California

Title
Optical microlithography XI : 25-27 February, 1998, Santa Clara, California / Luc Van den hove, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations SEMI--Semiconductor Equipment and Materials International, SEMATECH.
Publication
Bellingham, Washington : SPIE, [1998], ©1998.

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Details

Additional Authors
  • Van den Hove, Luc.
  • Society of Photo-optical Instrumentation Engineers.
  • Semiconductor Equipment and Materials International.
  • SEMATECH (Organization)
Description
xv, 1090 pages : illustrations; 28 cm.
Series Statement
SPIE proceedings series ; v. 3334
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3334.
Alternative Title
  • Optical microlithography 11
  • Opticl microlithography eleven
Subjects
Bibliography (note)
  • Includes bibliographical references and author index.
ISBN
0819427799
LCCN
98233147
OCLC
ocm39634653
Owning Institutions
Columbia University Libraries