Research Catalog

Micromachining and microfabrication process technology IV : 21-22 September, 1998, Santa Clara, California

Title
Micromachining and microfabrication process technology IV : 21-22 September, 1998, Santa Clara, California / James H. Smith, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and others].
Publication
Bellingham, Wash. : SPIE, [1998], ©1998.

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Details

Additional Authors
  • Smith, James H.
  • Society of Photo-optical Instrumentation Engineers.
  • Semiconductor Equipment and Materials International.
Description
xi, 402 pages : illustrations; 28 cm.
Series Statement
SPIE proceedings series ; v. 3511
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3511.
Subjects
Bibliography (note)
  • Includes bibliographical references and author index.
ISBN
0819429708
LCCN
99200342
OCLC
ocm39930212
Owning Institutions
Columbia University Libraries