Research Catalog

Materials and device characterization in micromachining : 21-22 September, 1998, Santa Clara, California

Title
Materials and device characterization in micromachining : 21-22 September, 1998, Santa Clara, California / Craig R. Friedrich, Yuli Valdimirsky, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperaing organizations , SEMI--Semiconductor Equipment and Materials International [and others].
Publication
Bellingham, Wash. : SPIE, [1998], ©1998.

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Additional Authors
  • Friedrich, Craig.
  • Vladimirsky, Yuli.
  • Society of Photo-optical Instrumentation Engineers.
  • Semiconductor Equipment and Materials International.
Description
xi, 442 pages : illustrations; 28 cm.
Series Statement
SPIE proceedings series, 0277-786X ; v. 3512
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3512.
Subjects
Bibliography (note)
  • Includes bibliographical references and author index.
ISBN
0819429716
LCCN
99200311
OCLC
ocm39930116
Owning Institutions
Columbia University Libraries