Research Catalog

Etching in microsystem technology

Title
Etching in microsystem technology / Michael Köhler ; translated by Antje Wiegand.
Author
Köhler, J. M. (J. Michael), 1956-
Publication
Weinheim ; New York : Wiley-VCH, [1999], ©1999.

Items in the Library & Off-site

Filter by

1 Item

StatusFormatAccessCall NumberItem Location
Request for On-site UseRequest Scan
How do I pick up this item and when will it be ready?
TextRequest in advance TK7872.M3 K64 1999Off-site

Holdings

Details

Description
xvi, 368 pages : illustrations; 25 cm
Uniform Title
Ätzverfahren für die Mikrotechnik. English
Alternative Title
Ätzverfahren für die Mikrotechnik.
Subjects
Bibliography (note)
  • Includes bibliographical references ([345]-360) and index.
ISBN
3527295615
LCCN
99233639
OCLC
ocm40684553
Owning Institutions
Columbia University Libraries