Research Catalog

Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France

Title
Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France / Bernard Courtois [and others], chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, CNRS-INPG-UJF (France) in cooperation with IEEE Computer Society Test Technology Technical Committee.
Publication
Bellingham, Wash., USA : SPIE, [1999], ©1999.

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Details

Additional Authors
  • Courtois, B. (Bernard)
  • Society of Photo-optical Instrumentation Engineers.
  • CNRS-INPG-UJF (France)
  • IEEE Computer Society. Test Technology Technical Committee.
Description
2 volumes (xix, 1192 pages) : illustrations (some color); 28 cm.
Series Statement
SPIE proceedings series, 0277-786X ; v. 3680
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3680.
Subject
  • Microelectromechanical systems > Testing > Congresses
  • Optoelectronic devices > Testing > Congresses
  • Micromachining > Congresses
  • Computer-aided design > Congresses
  • Detectors > Congresses
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0819431540
OCLC
  • 45094031
  • ocm45094031
Owning Institutions
Columbia University Libraries