Research Catalog

Optical microlithography XII : 17-19 March, 1999, Santa Clara, California

Title
Optical microlithography XII : 17-19 March, 1999, Santa Clara, California / Luc Van den Hove, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization SEMI--Semiconductor Equipment and Materials International, SEMATECH.
Publication
Bellingham, Washington : SPIE, [1999], ©1999.

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Holdings

Details

Additional Authors
  • Van den Hove, Luc.
  • Society of Photo-optical Instrumentation Engineers.
  • Semiconductor Equipment and Materials International.
  • SEMATECH (Organization)
Description
2 volumes (xiv, 1182 pages) : illustrations; 28 cm.
Series Statement
SPIE proceedings series ; v. 3679
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3679.
Subjects
Bibliography (note)
  • Includes bibliographical references and author index.
ISBN
0819431532
OCLC
ocm42206512
Owning Institutions
Columbia University Libraries