Research Catalog

15th European Conference on Mask Technology for Integrated Circuits and Microcomponents '98 : 16-17 November 1998, Munich-Unterhaching, Germany

Title: 15th European Conference on Mask Technology for Integrated Circuits and Microcomponents '98 : 16-17 November 1998, Munich-Unterhaching, Germany / Uwe Behringer, chair/editor ; organized by VDE/VDI-Society Microelectronics, Micro- and Precision Engineering (GMM) (Germany) [and] Institute for Microstructure Technology/Forschungszentrum Karlsruhe GmbH (Germany) ; cooperating organizations, SEMI-Europe--Semiconductor Equipment and Materials International, BACUS (USA), [and] SPIE--the International Society for Optical Engineering.
Author: European Conference on Mask Technology for Integrated Circuits and Microcomponents (15th : 1998 : Munich, Germany; Unterhaching, Germany)
Publication: Bellingham, Wash., USA : SPIE, [1999], ©1999.

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Status	Format	Access	Call Number	Item Location
Request for On-site Use Request Scan How do I pick up this item and when will it be ready?	Text	Request in advance	TK7872.M3 E89 1998g	Off-site

Additional Authors

Description

ix, 180 pages : illustrations; 28 cm.

Series Statement

SPIE proceedings series ; v. 3665

Uniform Title

Proceedings of SPIE--the International Society for Optical Engineering ; v. 3665.

Alternative Title

Fifteenth European Conference on Mask Technology for Integrated Circuits and Microcomponents
European Conference on Mask Technology for Integrated Circuits and Microcomponents
Mask technology for integrated circuits and microcomponents

Subject

Bibliography (note)

ISBN

0819431397

OCLC

ocm41488035

Owning Institutions

Columbia University Libraries